Single Crystals
Substrates for III-V nitride Film Deposition
| Material | Structure | Lattice Const. Å a |
Lattice Const. Å c |
Density (g/cm³ ) |
Melting Point C ° |
Thermal Expansion x 10-6/K° |
Standard Orientation |
Std. Sizes 0.5mm thick |
|---|---|---|---|---|---|---|---|---|
| Al2O3 | Hexagonal | 4.758 | 12.991 | 3.97 | 2030 | 7.50 | C-plane | 10 x 10mm 1/0 x 1.0" 2" Ø 3" Ø |
| MgO | Cubic | 4.216 | 3.58 | 2800 | 12.8 | (100) | 10 x 10mm 1 x 1" 2 x 2" |
|
| MgAl2O4 | Cubic | 8.083 | 3.60 | 2130 | 7.45 | (111) | 10 x 10mm 32mm Ø 1.5" Ø |
|
| ZnO | Hexagonal | 3.252 | 5.313 | 5.605 | 1975 | 2.90 | (0001) | 10 x 10mm 20 x 20mm |
| SiC | Hexagonal | 3.08 | 15.12 | 3.217 | sublimes | 10.3 | 6H | 10 x 10mm |
| LiAlO2 (2) | Tetragonal | 5.17 | 6.26 | 1700 | (100) | 10 x 10mm 15 x 20mm |
||
| InP | Cubic | 5.869 | 1070 | 4.50 | (100) (111) |
2.0" Ø | ||
| GaP | Cubic | 5.451 | 1348 | 4.65 | (100) (111) (311) |
45mm Ø | ||
| GaAs | Cubic | 5.653 | 1238 | 6.00 | 2.0" Ø | |||
| GaN (1) | Hexagonal | 3.189 | 5.815 | 6.1 | sublimes | 5.59 | ||
| NiAl | Cubic | 2.880 | 1720 | 20mm Ø | ||||
| LiGaO2 (2) | Orthohombic | 5.4006 | (b) 5.012 (c) 6.379 |
1600 | (001) | 10 x 10mm 25mm Ø 50mm Ø |
||
| CdSe | > 1350 | Call | Call |