Sapphire > Sapphire Substrates for Blue LEDs
| Crystal Structure |
Hexagonal |
| Lattice Constant Å |
a - 4,765
c - 13,000 |
| Orientation |
C-axis (0001) ± 0.1° |
Diameter: 2"
Diameter: 3" |
50.80 ± 0.05mm
76.2 ± 0.05mm |
Thickness: 2" dia
Thickness: 3" dia |
330 - 430 ± 50 µm
380 - 480 ± 50 µm |
TTV: 2" dia
TTV: 3" dia |
<20 µm
<25 µm |
Bow: 2" dia
Bow: 3" dia |
<20 µm
<25 µm |
| Front Surface |
Epi polish |
| Backside |
Fine ground or Polished |
| Flatness |
<5 microns |
| Surface roughness (Ra) |
<0.3nm |
Orientation Flat: 2" dia
Orientation Flat: 3" dia |
16mm ± 0.5 mm
22mm ± 0.5 mm |
| Primary Flat Location |
A-axis [11-20] ± 0.5° or
M-axis [10-10] ± 0.5° |
| Secondary Flat |
90° counterclockwise to primary |
| Bow |
<2 µm, misoriented substrates, other wafer tolerances available |
| Control Methods |
Raw sapphire: inductively coupled argon plasma
Crystal Quality: polarized light, focused light
Orientation: X-ray
Surface quality: AFM & Interferometer. |
* Call for specifications on other sizes.
Additional substrates for III-V nitride film deposition
Substrates for Superconductor Thin Films
Sapphire Table of General Properties
Back to main Sapphire page
|
